China Hcvac Cathodic Multi Arc Ion PVD Vacuum Coating Machine Equipment, Find details about China Arc Ion Vacuum Coating Machine, Multi Arc Ion Coating Machine from Hcvac Cathodic Multi Arc Ion PVD Vacuum Coating Machine Equipment
Mode Dimension | LH-800 | LH-1250 | LH-1416 | LH-1618 |
800*1000mm | 1200*1500mm | 1400*1600mm | 1600*1800mm | |
Coating mode and main confirguration | Eight multi-arc targets | Twelve multi-arc targets | Fourteen multi-arc targets | Twenty multi-arc targets |
Power source | Electric-arc power, Filament power, Pulsed bias power supply | |||
Process gas control | Mass flowmeter + Electromagnetic ceramic valve | |||
Vacuum chamber structure | Vertical side opening door, pump system postposition, double water cooling | |||
Vacuum system | Molecule pump +Roots pump +Mechanical pump(5.0*10 -5 Pa) Diffusion pump +Roots pump +Mechanical pump(5.0*10 -4 Pa) | |||
Workpiece baking temperature | Normal temperature to 350 centi-degree PID control, radiation heating. | |||
Workpiece motion mode | Public rotation Frequency control: 0-20 rotation per minute | |||
Measure mode | Number display composite vacuum gauge: from atmosphere to 1.0*10 -5 Pa | |||
Control mode | Manual/Automatic/PC/PLC + HMI/PC four choice of control mode | |||
Remark | We can design the dimension of the equipment according to customer's special technique requirement. |