China Hcvac Mf PVD Magnetron Sputtering Coating Machine, Medium Frequency Sputtering System, Find details about China Magnetron Sputter Deposition System, Magnetron Sputtering Coating Machine from Hcvac Mf PVD Magnetron Sputtering Coating Machine, Medium Frequency Sputtering System
Mode Dimension | JTL-900 | JTL-1100 | JTL-1300 | JTL-1600 |
Φ9001000mm | Φ11001000mm | Φ13001200 mm | Φ16001200 mm | |
Coating mode and main confirguration | 3 electric-arc+2 pairs of plane rectangular cathode | 6 electric-arc+2 pairs of cylindrical cathode+a pairs of plane rectangular cathode | 5 electric-arc+4 pairs of cylindrical cathode+a pairs of plane rectangular cathode | 6 electric-arc+8 pairs of cylindrical cathode+a pairs of plane rectangular cathode |
Application | metal decorative coating | |||
Film Types | Metal films,Dielectric films,Compound films,Reaction films,Muti-layer function films | |||
Power source | Electric arc power supply,DC magnetron power supply,MF magnetron power supply.Pulse bias voltage power supply.ion source power supply. | |||
Process gas control | Quality flowmeter + electromagnetism ceramic valve | |||
Vacuum chamber structure | Vertical single(side) door, pump system postposition, double water-cooling | |||
Vacuum system | Molecule pump(diffusion pump)+Roots pump +Mechanical pump (8.0*10 -4 Pa) | |||
Pumping speed | Pumping time less than 15 minutes ,from atmospheric pressure to 310 -3 Pa | |||
Workpiece baking temperature | Normal temperature to 350 centi-degree PID control, radiation heating. | |||
Workpiece motion mode | Public rotation Frequency control: 0-20 rotation per minute | |||
Measure mode | Number display composite vacuum gauge: from atmosphere to 1.0*10 -5 Pa | |||
Control mode | Full automation control system PC+PLC/PC+HMI | |||
Remark | We can design the dimension of the equipment according to customers special technique requirement. |