China DC Magnetron Sputtering Coater with Rotary Stage and Water Chiller, Find details about China DC Magnetron Sputtering Coater, Compact Magnetron Sputtering Coater from DC Magnetron Sputtering Coater with Rotary Stage and Water Chiller
Input Voltage | 110/220VAC switchable |
Output Power | 1600VDC 250W 150mA max. Built-in over current (>150mA) protection |
Specimen chamber | Quartz glass tube, 167mm OD. x 152mm ID x 260mm Height |
Sputtering Head & Specimen stage | 2" magnetron sputtering head with water cooling jacket is included One 50 mm Dia stainless steel .sample stage is built in, which is rotatable from 0 - 5 RPM One manually operated shutter is build in to achieve better coating Built in a fixture to place sputtering head when open chamber Distance between sputtering head and sample stage is adjustable from 60 - 100 mm. One Air Cold Recirculating Water Chiller 10L / min Flow is included for cooling sputtering head. |
Control Panel | 6" color touch-screen control panel for easy operation One panel controls all parameters, including vacuum, current, target position and substrate heating temperature |
Ultimate Vacuum Pressure | Built in KF25 vacuum port The system requires a Ar gas tank with pressure regulator, which is not included <10E-2 mbar by vane vacuum pump (not included) 7.5E-5 mbar by Turbo molecular pump (not included) |
Gas Atmosphere | One needle valve installed to allow Ar gas inlet to achieve better plasma coating |
Target | Target size: 50 mm dia. x (0.1 - 3) mm,thickness |