1500c Single-Zone High-Vacuum CVD Furnace with 3-Channel Mass Flow Meter
China 1500c Single-Zone High-Vacuum CVD Furnace with 3-Channel Mass Flow Meter, Find details about China 1500c Single-Zone High-Vacuum CVD Furnace, High-Vacuum CVD Furnace from 1500c Single-Zone High-Vacuum CVD Furnace with 3-Channel Mass Flow Meter
Basic Info.
Model NO.
CY-O1500-60IT-3Z-HV
Vacuum Tube Furnace
High Purity Alumina
Tube Diameter
60mm
Tube Length
1000mm
Heating Zone Length
300mm
Operating Temperature
0-1450c
Gas Supply System
Gas Mass Flowmeter
Measurement Accuracy
+-0.2%
Ultimate Vacuum
1.0e-5PA
Rotary Vane Pump
1.1L/S
Molecular Pump
600L/S
Trademark
CYKY
Specification
Vacuum high-purity alumina tube
Origin
Zhengzhou Henan China
Model NO.
CY-O1500-60IT-3Z-HV
Vacuum Tube Furnace
High Purity Alumina
Tube Diameter
60mm
Tube Length
1000mm
Heating Zone Length
300mm
Operating Temperature
0-1450c
Gas Supply System
Gas Mass Flowmeter
Measurement Accuracy
+-0.2%
Ultimate Vacuum
1.0e-5PA
Rotary Vane Pump
1.1L/S
Molecular Pump
600L/S
Trademark
CYKY
Specification
Vacuum high-purity alumina tube
Origin
Zhengzhou Henan China
Product Desciption
1500C single-zone high-vacuum CVD furnace with 3-channel mass flow meter
Product description of CVD furnace
1500ºC single heating zone high vacuum CVD furnace with 3-channel mass flow meter CY-O1500-60IT-3Z-HV consists of a 1500ºC single temperature zone tube furnace, a three-channel float flowmeter and a high vacuum molecular pump set.
tube furnace
The tube furnace is controlled by the precision temperature control instrument for PID temperature control. It can edit the 30-segment temperature rise and fall program and has the function of overheating and short circuit protection. The flanges on both sides of the furnace tube are equipped with a digital vacuum gauge and a mechanical pressure gauge, which can be used to control the atmosphere in the furnace tube. At the same time, the tube furnace is operated by high-definition true color touch screen, which is easy to use. Even non-professionals can master the use of the instrument after simple training, which can greatly improve your experiment efficiency.
The furnace tube is made of high-purity alumina, and the furnace body adopts integrated design. The unique design can ensure the system is stable and safe at 1500ºC. The heating element is made of high-quality silicon carbon rod, which can reach 1500ºC high temperature. If the customer has the need, the silicon molybdenum rod heating element can be customized to achieve a higher temperature of 1700ºC.
flow meter
The CVD furnace is equipped with three-channel mass flowmeter, which has high precision and high reliability. It can accurately mix 1~3 channels of gas. The operation panel adopts digital display, which is intuitive and efficient. If you have special needs, you can contact the technician to customize any number of gas channels.
high vacuum pump
The CVD furnace is also equipped with a precision molecular pump set, which can achieve a vacuum of 1.0E-3pa level, which can provide users with a purer and more stringent experimental environment than ordinary mechanical pumps.
applications:
It is suitable for preparing carbon nanotubes ,metal annealing, quality inspection, diamond thin film etc. in universities, research institutes, industrial and mining enterprises, especially for CVD experiments that require a variety of gas mixing atmospheres.
Technical parameters of CVD furnace
NOTE: According to the needs of the experiment, you can choose the temperature, temperature zone, furnace size, vacuum system, flowmeter
Related photos of CVD furnace
tube furnace
flow meter
high vacuum pump
Product description of CVD furnace
1500ºC single heating zone high vacuum CVD furnace with 3-channel mass flow meter CY-O1500-60IT-3Z-HV consists of a 1500ºC single temperature zone tube furnace, a three-channel float flowmeter and a high vacuum molecular pump set.
tube furnace
The tube furnace is controlled by the precision temperature control instrument for PID temperature control. It can edit the 30-segment temperature rise and fall program and has the function of overheating and short circuit protection. The flanges on both sides of the furnace tube are equipped with a digital vacuum gauge and a mechanical pressure gauge, which can be used to control the atmosphere in the furnace tube. At the same time, the tube furnace is operated by high-definition true color touch screen, which is easy to use. Even non-professionals can master the use of the instrument after simple training, which can greatly improve your experiment efficiency.
The furnace tube is made of high-purity alumina, and the furnace body adopts integrated design. The unique design can ensure the system is stable and safe at 1500ºC. The heating element is made of high-quality silicon carbon rod, which can reach 1500ºC high temperature. If the customer has the need, the silicon molybdenum rod heating element can be customized to achieve a higher temperature of 1700ºC.
flow meter
The CVD furnace is equipped with three-channel mass flowmeter, which has high precision and high reliability. It can accurately mix 1~3 channels of gas. The operation panel adopts digital display, which is intuitive and efficient. If you have special needs, you can contact the technician to customize any number of gas channels.
high vacuum pump
The CVD furnace is also equipped with a precision molecular pump set, which can achieve a vacuum of 1.0E-3pa level, which can provide users with a purer and more stringent experimental environment than ordinary mechanical pumps.
applications:
It is suitable for preparing carbon nanotubes ,metal annealing, quality inspection, diamond thin film etc. in universities, research institutes, industrial and mining enterprises, especially for CVD experiments that require a variety of gas mixing atmospheres.
Technical parameters of CVD furnace
| Vacuum tube furnace | Model | CY-O1500-60IT | |
| Tube material | High purity alumina | ||
| Tube diameter | 60mm (optional 50mm, 80mm, 100mm) | ||
| Tube length | 1000mm | ||
| Furnace chamber length | 400mm | ||
| Heating zone length | 300mm | ||
| Constant temperature zone | 150mm | ||
| Operating temperature | ≤1450ºC | ||
| Temperature control accuracy | ±1ºC | ||
| Temperature control mode | 30 or 50 segment program temperature control | ||
| Display mode | LCD | ||
| Sealing method | 304 stainless steel vacuum flange | ||
| Flange interface | 1/4" ferrule connector, KF16/25/40 joint | ||
| Vacuum | 4.4E-3Pa | ||
| Power supply | AC:220V 50/60Hz | ||
| Gas supply system | Model | CY-3Z | |
| Gas channel | 3-channel | ||
| Measuring unit | Gas mass flowmeter | ||
| Measuring range | A channel: 0~100SCCM H2 gas | Remarks: If you need other ranges or gas types, you need to specify when ordering. According to the customer's specific requirements, the flow meter of the corresponding gas type and range can be selected. | |
| B channel: 0~300SCCM N2 gas | |||
| C channel: 0~500SCCM Ar gas | |||
| measurement accuracy | ±1.0%F.S | ||
| Pipe pressure resistance | 3MPa | ||
| Working pressure difference | 50~300KPa | ||
| Connecting pipe | 304 stainless steel | ||
| Gas channel | 304 stainless steel needle valve | ||
| Interface specification | 1/4" ferrule connector for gas inlet and outlet | ||
| Power supply | AC:220V 50/60Hz | ||
| Exhaust system | Mechanical pump | Rotary vane pump | |
| Pumping rate | 1.1L/S | ||
| Exhaust interface | KF16 | ||
| Vacuum measurement | Resistance gauge | ||
| Ultimate vacuum | 1.0E-1Pa | ||
| Power supply | AC:220V 50/60Hz | ||
| Pumping interface | KF16 | ||
NOTE: According to the needs of the experiment, you can choose the temperature, temperature zone, furnace size, vacuum system, flowmeter
Related photos of CVD furnace
tube furnace
flow meter
high vacuum pump
Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.
We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
More questions, please contact customer service
We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
More questions, please contact customer service
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