China CVD Tube Furnace Dedicated Device for Preparing Carbon Nanotubes, Find details about China Chemical Vapor Deposition Furnace, Chemical Vapor Deposition from CVD Tube Furnace Dedicated Device for Preparing Carbon Nanotubes
Vacuum tube furnace | Model | CY-O1500-60IT | |
Tube material | High purity alumina | ||
Tube diameter | 60mm (optional 50mm, 80mm, 100mm) | ||
Tube length | 1000mm | ||
Furnace chamber length | 400mm | ||
Heating zone length | 300mm | ||
Constant temperature zone | 150mm | ||
Operating temperature | ≤1450ºC | ||
Temperature control accuracy | ±1ºC | ||
Temperature control mode | 30 or 50 segment program temperature control | ||
Display mode | LCD | ||
Sealing method | 304 stainless steel vacuum flange | ||
Flange interface | 1/4" ferrule connector, KF16/25/40 joint | ||
Vacuum | 4.4E-3Pa | ||
Power supply | AC:220V 50/60Hz | ||
Gas supply system | Model | CY-3Z | |
Gas channel | 3-channel | ||
Measuring unit | Gas mass flowmeter | ||
Measuring range | A channel: 0~100SCCM H2 gas | Remarks: If you need other ranges or gas types, you need to specify when ordering. According to the customer's specific requirements, the flow meter of the corresponding gas type and range can be selected. | |
B channel: 0~300SCCM N2 gas | |||
C channel: 0~500SCCM Ar gas | |||
measurement accuracy | ±1.0%F.S | ||
Pipe pressure resistance | 3MPa | ||
Working pressure difference | 50~300KPa | ||
Connecting pipe | 304 stainless steel | ||
Gas channel | 304 stainless steel needle valve | ||
Interface specification | 1/4" ferrule connector for gas inlet and outlet | ||
Power supply | AC:220V 50/60Hz | ||
Exhaust system | Mechanical pump | Rotary vane pump | |
Pumping rate | 1.1L/S | ||
Exhaust interface | KF16 | ||
Vacuum measurement | Resistance gauge | ||
Ultimate vacuum | 1.0E-1Pa | ||
Power supply | AC:220V 50/60Hz | ||
Pumping interface | KF16 |