General DescriptionCapsule-A Series Capsule Filter is designed for photoresist filtration,the unique threejoint
design makes the pipeline connection more convenient.Electronic grade material
reduce the risk of precipitation, to ensure safe filtration. Chemical compatibility is good
and been widely used.
FEATURES• Convenient connection design, saving filter start-up time
• Wafer defect reduction
• Low precipitation
The filter cartridge is made of high purity electronic grade material to ensure low
precipitation.Thermal weld welding technology do not add any adhesive and active agent,
effectively reduce the risk of filter precipitation, ensure the safe usage.
• Full process clean produciton ensure the product cleaness
SpecificationsRemoval ratings | 0.05=0.05um 0.1 = 0.1μm 0.2 = 0.2μm 0.45 = 0.45μm 1 = 1μm |
Media | PP/ PTFE |
Cage / Core / End cap | PP |
Sealing | EPDM,E-FKM |
Max. Operating temperature | 60ºC |
Max. Operating DP | 4 bar@21ºC |
Order InformationFor example:PAA0.22R10SRating:0.22um, 222/fin/SS,Length: 10",seal material:Silicone