configuration
Model

CCZK-1012-ION

CCZK-1416-ION

CCZK-1618-ION

CCZK-1820-ION

CCZK-2022-ION

CCZK-2030-ION

CCZK-2235-ION

Chamber size(MM)

D1000*H2000

D1400*H1600

D1600*H1800

D1800*H2000

D2000*H2200

D2000*H3000

D2200*H3500

Vacuum system

Diffusion pump/Molecular pump + Roots pump + Double stage direct driver Rotary pump + Holding pump + Cryogenic pump(optional)

Arc
power supply

7th generation
10sets

7th generation

12sets

7th generation

16sets

7th generation

20sets

7th generation

24sets

7th generation

28sets

7th generation

36sets

Arc source

7th generation

10sets

7th generation

12sets

7th generation

16sets

7th generation

20sets

7th generation

24sets

7th generation

28sets

7th generation

36sets

Bias
power supply

20KW

30KW

40KW

40KW

50KW

60KW

80KW

Gas
MFC system

4-way intake sys

4-way intake sys

4-way intake sys

4-way intake sys

4-way intake sys

4-way intake sys

4-way intake sys

Baking system

Up to 350C

Up to 350C

Up to 350C

Up to 350C

Up to 350C

Up to 350C

Up to 350C

Control system

IPC + PLC+HMI Full automatic + Remote control system ( optional)

Ultimate vacuum

5.0*10-4pa

5.0*10-4pa

5.0*10-4pa

5.0*10-4pa

5.0*10-4pa

5.0*10-4pa

5.0*10-4pa

Total power

50KW

75KW

145KW

190KW

250KW

305KW

455KW

Coating

Cycle time

Around 15 to 50 mins one cycle ( Depending on the coating film layer of different coating products)

Delivery container size

1set 20GP

1set 20GP

1set 20GP

1set 40HQ

1set 40HQ

1set 20FR

1set 40GP

1set 20FR

2sets 40HQ

Machine installing time

7days

(1engineer)

7days

(1engineer)

7days

(1engineer)

10days

(2engineers)

10days

(2engineers)

15days

(2engineers)

20days

(2engineers)

Customized

Size
is available

Customized