China Nitrogen Trifluoride/NF3 Gas Manufacture, Find details about China NF3, Nitrogen Trifluoride from Nitrogen Trifluoride/NF3 Gas Manufacture
Nitrogen Trifluoride NF3 , 99.99~99.999% , Used With Tungsten Silicide , And Tungsten Produced By CVD
Description:
NF3 is a colorless gas with a moldy odor. Very toxic by inhalation. Slightly soluble in water. Corrosive to tissue. Under prolonged exposure to fire or heat the containers may rupture violently and rocket. Used to make other chemicals and as a component of rocket fuels.
Keep combustibles (wood, paper, oil, etc.) away from spilled material. Do not touch or walk through spilled material. Stop leak if you can do it without risk. If possible, turn leaking containers so that gas escapes rather than liquid. Do not direct water at spill or source of leak. Use water spray to reduce vapors or divert vapor cloud drift. Avoid allowing water runoff to contact spilled material. Prevent entry into waterways, sewers, basements or confined areas. Allow substance to evaporate. Isolate area until gas has dispersed. CAUTION: When in contact with refrigerated/cryogenic liquids, many materials become brittle and are likely to break without warning.
Specifications:
1. Physical properties
Product Name | Nitrogen Trifluoride |
Molecular Formula | NF3 |
UN No. | UN 2451 |
CAS No. | 7783-54-2 |
EINECS No. | 232-007-1 |
2. Typical technical data
Impurities | NF3 ≥ 99.995% | NF3 ≥ 99.99% | NF3 ≥ 99.98% | NF3 ≥ 99.9% |
CF4 | ≤20 Vol.ppm | ≤40 Vol.ppm | ≤100 Vol.ppm | ≤500 Vol.ppm |
N2 | ≤5 Vol.ppm | ≤5 Vol.ppm | ≤10 Vol.ppm | ≤50 Vol.ppm |
O2+Ar | ≤3 Vol.ppm | ≤5 Vol.ppm | ≤10 Vol.ppm | ≤50 Vol.ppm |
CO2 | ≤1 Vol.ppm | ≤5 Vol.ppm | ≤10 Vol.ppm | ≤10 Vol.ppm |
H2O | ≤1 Vol.ppm | ≤1 Vol.ppm | ≤1 Vol.ppm | ≤1 Vol.ppm |
HF | ≤1 Vol.ppm | ≤1 Vol.ppm | ≤1 Vol.ppm | ≤1 Vol.ppm |
SF6 | ≤1 Vol.ppm | ≤2 Vol.ppm | ≤2 Vol.ppm | ≤25 Vol.ppm |
N2O | ≤1 Vol.ppm | ≤5 Vol.ppm | ≤10 Vol.ppm | ≤10 Vol.ppm |
CO | ≤0.5 Vol.ppm | ≤5 Vol.ppm | ≤10 Vol.ppm | ≤10 Vol.ppm |
3. Packing and delivery
DOT 3AA / ISO 9809 seamless steel cylinders/ ton cylinder
Applications:
Nitrogen Trifluoride (NF3) has been widely used in electronic industry, semiconductor and solar photo-electricity industry etc. it's a good etching and cleaning gas with advantages of no remaining, high cleaning speed and easy to decompose.
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