China Super Precision Blade Dicing Saw for Wafer Cutting (DS623), Find details about China Dicing Saw, Dicing Machine from Super Precision Blade Dicing Saw for Wafer Cutting (DS623)
Specifications | ||
Configuration and performance | Workpiece size | Φ160mm | ≤150mm x 150mm |
Groove depth | ≤4mm or customize | |
Table flatness | ±0.005mm/150mm | |
Alignment system | 70x straight light + ring light (240x optional) | |
Spindle | Revolution speed range | 10000~50000 rpm |
Output power | 1.5kW (2.4kW optional) | |
X axis | Drive mode | Servo motor |
Max. stroke | 240mm | |
Stroke resolution | 0.001mm | |
Feed speed range | 0.1~500mm/s | |
Y axis | Drive mode | Step motor + grating closed-loop control system |
Max. stroke | 170mm | |
Stroke resolution | 0.0001mm | |
Single-step positioning accuracy | ≤0.002mm/5mm | |
Index positioning accuracy | ≤0.004mm/170mm | |
Z axis | Drive mode | Step motor |
Max. stroke | 30mm | |
Stroke resolution | 0.001mm | |
Repeatability accuracy | 0.002mm | |
Θ axis | Drive mode | Imported DD motor |
Max. rotating angle | 380° | |
Angle resolution | 0.0002° | |
Basic specification | Power supply | Single phase, AC220V±10% |
Power consumption | 0.8kW (processing) | |
0.7kW (warming up) | ||
Compressed air | Pressure: 0.55~0.8Mpa; average flow rate: 450L/min | |
Cleaning water | Pressure: 0.2~0.4Mpa; flow rate: 3.5L/min | |
Cooling water | Pressure: 0.2~0.4Mpa; flow rate: 1.5L/min | |
Exhaust air rate | 1.5m3/min (ANR) | |
Overall dimensions W×D×H | 580mm×850mm×1680mm | |
Weight | 500kg |
Environmental Conditions |