China High Precision Blade Dicing Saw for 8" Wafer Cutting Ds830 CE, Find details about China Dicing Saw, Dicing Machine from High Precision Blade Dicing Saw for 8" Wafer Cutting Ds830 CE
Specifications | ||
Configuration and performance | Workpiece size | Φ200mm | 180mm (for square) |
Groove depth | ≤4mm or customize | |
Table flatness | ±0.005mm/150mm | |
Alignment system | 80x straight light + ring light (40x 210x optional) | |
Spindle | Revolution speed range | 10000~50000 rpm |
Output power | 1.5kW(2.2kW optional) | |
X axis | Drive mode | Servo motor |
Max. stroke | 380mm | |
Stroke resolution | 0.001mm | |
Feed speed range | 0.1~400mm/s | |
Y axis | Drive mode | Step motor + grating closed-loop control system |
Max. stroke | 210mm | |
Stroke resolution | 0.0005mm | |
Single-step positioning accuracy | ≤0.003mm/5mm | |
Index positioning accuracy | ≤0.005mm/210mm | |
Z axis | Drive mode | Step motor |
Max. stroke | 30mm | |
Stroke resolution | 0.001mm | |
Repeatability accuracy | 0.002mm | |
Θ axis | Drive mode | DD motor |
Max. rotating angle | 380° | |
Angle resolution | 0.0002° | |
Basic specification | Power supply | Single phase, AC220V±10% |
Power consumption | 0.9kW (processing) | |
0.8kW (warming up) | ||
Compressed air | Pressure: 0.55~0.8Mpa; average flow rate: 350L/min | |
Cleaning water | Pressure: 0.2~0.4Mpa; flow rate 3.0L/min | |
Cooling water | Pressure: 0.2~0.4Mpa; flow rate 1.5L/min | |
Exhaust air rate | 1.8m3/min (ANR) | |
Overall dimensions W×D×H | 775mm×960mm×1650 mm | |
Weight | 600kg |
Environmental Conditions |