Hcvac PVD Magnetron Sputtering Vacuum Coating Equipment
China Hcvac PVD Magnetron Sputtering Vacuum Coating Equipment, Find details about China Magnetron Sputtering Equipment, Magnetron Sputter Machine from Hcvac PVD Magnetron Sputtering Vacuum Coating Equipment
PVD magnetron sputter coating equipment/Titanium magnetron sputtering vacuum coating machine
(Suitable for glass,ceramic,metal,mosaic,crystal ect,but not for plastic)
This kind of machine mainly integrate the technology of MF magnetron sputtering and electric arc ion evaporation, combining the ion source and the pulse bias voltage. It is fully automatic control when coating films.
Applied industry:It is widely used in the watchband, watchcase, jewelry,mobile shell, hardware, tableware, etc. It can coat TiN, TiC, TiCN, TiAlN, CrN, Cu, Au, Al2O3 and other decorative films.It can get fineness and smooth film,good adhesion.
Technical Parameter:
Mode Dimension | JTL-0910 | JTL-1100 | JTL-1250 |
900*1000mm | 1100*1000mm | 1250*1500mm | |
Coating mode and main confirguration | Six multi-arc targets + one set of column targets + one set of plane rectangle magnetron sputtering targets | Eight multi-arc targets + a pair of twin (MF)magnetron sputtering targets | Twelve multi-arc targets + two sets of plane rectangle magnetron sputtering targets+ a pair of twin (MF)magnetron sputtering targets |
Power source | Electric arc power, DC magnetron power, MF magnetron power, filament power, pulse power, linear ionized source. | ||
Process gas control | Quality flowmeter + electromagnetism ceramic valve | ||
Vacuum chamber structure | Vertical single(side) door, pump system postposition, double water-cooling | ||
Vacuum system | Molecule pump +Roots pump +Mechanical pump(5.0*10-5Pa) Diffusion pump +Roots pump +Mechanical pump(5.0*10-4Pa) | ||
Workpiece baking temperature |
Normal temperature to 350 centi-degree PID control, radiation heating. | ||
Workpiece motion mode | Public rotation Frequency control: 0-20 rotation per minute | ||
Measure mode | Number display composite vacuum gauge: from atmosphere to 1.0*10-5Pa | ||
Control mode | Manual/Automatic/PC/PLC + HMI/PC four choice of control mode | ||
Remark | We can design the dimension of the equipment according to customer's special technique requirement. | ||
We can design the dimension of the vacuum chamber according to your requirements. We can also design and configure the vacuum unit and electric controlling system according to your requirement.
This is our machine:
Small size machine:
Big size side open door machine:(for sheet,furniture parts)
Big size top open door:
Horizontal type:
Samples coated:
For hardware and SS material:
For glass and ceramic:
| Mode Dimension | LH-800 | LH-1250 | LH-1416 | LH-1618 |
| 800*1000mm | 1200*1500mm | 1400*1600mm | 1600*1800mm | |
| Coating mode and main confirguration | Eight multi-arc targets | Twelve multi-arc targets | Fourteen multi-arc targets | Twenty multi-arc targets |
| Power source | Electric-arc power, Filament power, Pulsed bias power supply | |||
| Process gas control | Mass flowmeter + Electromagnetic ceramic valve | |||
| Vacuum chamber structure | Vertical side opening door, pump system postposition, double water cooling | |||
| Vacuum system | Molecule pump +Roots pump +Mechanical pump(5.0*10 -5 Pa) Diffusion pump +Roots pump +Mechanical pump(5.0*10 -4 Pa) | |||
| Workpiece baking temperature | Normal temperature to 350 centi-degree PID control, radiation heating. | |||
| Workpiece motion mode | Public rotation Frequency control: 0-20 rotation per minute | |||
| Measure mode | Number display composite vacuum gauge: from atmosphere to 1.0*10 -5 Pa | |||
| Control mode | Manual/Automatic/PC/PLC + HMI/PC four choice of control mode | |||
| Remark | We can design the dimension of the equipment according to customer's special technique requirement. | |||
More information about our vacuum coating machine, pls do not hesitate to contact:
Contact person: Mandy Liu
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