1100c CVD/ Pecvd Tube Furnace with Slide Rail CVD Vacuum Atmosphere Inert Gas Tube Furnace

China 1100c CVD/Pecvd Tube Furnace with Slide Rail CVD Vacuum Atmosphere Inert Gas Tube Furnace, Find details about China Tube Furnace, Industrial Furnace from 1100c CVD/Pecvd Tube Furnace with Slide Rail CVD Vacuum Atmosphere Inert Gas Tube Furnace

Model NO.
FGL(RTP)-25/11/1
Color
White
Application
Industry, School, Lab
Trademark
faceroom
Transport Package
Packed in Wooden Box
Origin
China
HS Code
8514109000
Model NO.
FGL(RTP)-25/11/1
Color
White
Application
Industry, School, Lab
Trademark
faceroom
Transport Package
Packed in Wooden Box
Origin
China
HS Code
8514109000
Product Description

 

 

FGL (RTP) series slide rail tubular furnace
(Max.Temp. 1100ºC)
Application:The integrated structure design of slide rail tubular furnace is used for the special process requirements of rapid temperature rise and rapid temperature drop below 1100 ºC, and the purpose of rapid cooling is realized by moving the furnace body.At the same time, the temperature can be preset and then moved to the sample to achieve the effect of rapid temperature rise. It is suitable for widely used RTP process and CVD graphene process.
Characteristic:
  1. Service temperature RT ~ 1000 ºC;
  2. The intelligent program temperature controller has accurate control and can edit, store and call multi-stage programs
  3. Furnace shell structure, double-layer furnace shell air cooling structure;
  4. Stainless steel double seal,flange seal
  5. Adjustable flange support structure at both ends to prolong the service life of quartz tube
  6. LED panel,high strength, anti damage, all stainless steel button, durable
  7. Overtemperature protection function, when the temperature exceeds the allowable setting value, the power will be cut off automatically
  8. Safety protection: automatically cut off the power when the furnace body leaks electricity
  9. K-type thermocouple, accurate temperature control
  10. The heating element is a ceramic fiber heating module with a heating wire embedded structure
Additional options:
  1. Vacuum system: (rotary vane mechanical pump, diffusion pump unit and molecular pump unit)
  2. Atmosphere system: (float flowmeter, mass flowmeter)
Note: expansion cabinet is required for options

 
Product Parameters

 





Technical Parameter
Serial No.working temperature(ºC)Outer diameter of furnace tube
(mm)
Furnace tube length
(mm)
Heating length
(mm)
Number of temperature zonesExternal dimensions (mm)
(W×H×D)
Voltage
(V)
Power
(kW)
FGL(RTP)-25/11/1RT~100025150032011500*710*5002201.2
FGL(RTP)-50/11/1RT~100050150032011500*710*500220

3.0
FGL(RTP)-60/11/1RT~100060150032011500*710*500220
FGL(RTP)-80/11/1RT~100080150032011500*710*500220
Note:
  1. The overall dimensions do not include the dimensions of vacuum unit connectors such as flange, furnace tube and flange support.
  2. Other pipe diameters, number of temperature zones and length of heating zone can be customized according to customer process requirements.

Detailed Photos


 
1100c CVD/Pecvd Tube Furnace with Slide Rail CVD Vacuum Atmosphere Inert Gas Tube Furnace1100c CVD/Pecvd Tube Furnace with Slide Rail CVD Vacuum Atmosphere Inert Gas Tube Furnace

Certifications

1100c CVD/Pecvd Tube Furnace with Slide Rail CVD Vacuum Atmosphere Inert Gas Tube Furnace

Packaging & Shipping

 


1100c CVD/Pecvd Tube Furnace with Slide Rail CVD Vacuum Atmosphere Inert Gas Tube Furnace1100c CVD/Pecvd Tube Furnace with Slide Rail CVD Vacuum Atmosphere Inert Gas Tube Furnace1100c CVD/Pecvd Tube Furnace with Slide Rail CVD Vacuum Atmosphere Inert Gas Tube Furnace1100c CVD/Pecvd Tube Furnace with Slide Rail CVD Vacuum Atmosphere Inert Gas Tube Furnace1100c CVD/Pecvd Tube Furnace with Slide Rail CVD Vacuum Atmosphere Inert Gas Tube Furnace1100c CVD/Pecvd Tube Furnace with Slide Rail CVD Vacuum Atmosphere Inert Gas Tube Furnace