China Low Vacuum Laboratory Mini CVD Tube Furnace with Three Gas Channels, Find details about China Low Vacuum CVD Furnace, Thermal CVD Equipment from Low Vacuum Laboratory Mini CVD Tube Furnace with Three Gas Channels
Product | CY-1200CVD system |
Chamber Type | Split Chamber |
Display | LED digital display |
Chamber Material | Alumina Fiber |
Heating Element | Resistance wire |
Max Temperature | 1200°C |
Usable Range | ≤1100°C |
Heating Rate | ≤20°C(suggestion:10°C/min) |
Heating Zone | Single |
Heated length | 220mm |
Length constant temperature | 100mm |
Tube Material | High purity quartz |
Tube Size | Φ50mm x700mm |
Vacuum Seal | 1.03×10-3Pa |
Temperature Control | PID automatic control via SCR power control |
Accuracy | ±1°C |
Preset curve | 10 |
Thermocouple | K Type |
Working Voltage | 220V 50Hz~60Hz |
Max. Power | 1.8KW |
Gas Channels | 3 gas channels (can be designed as your requirement) |
Gas controller | MFCS with range of 0 -500 sccm |
Vacuum pump | 10 Pa Rotary vacuum pump 10(-4) Pa high vacuum pump system |