China Special Activated Carbon for Carbon Tetrafluoride (CF4), Find details about China Charcoal, Absorbent from Special Activated Carbon for Carbon Tetrafluoride (CF4)
CF4(carbon tetrafluoride)is the largest electronic gas used in the microelectronics industry at present, and it's also a very strong greenhouse gas (GHG). Direct emission of CF4 will cause huge damage to the global environment.
The main process of treating CF4 with activated carbon: firstly, using activated carbon and adsorption- desorption equipment to capture and adsorb CF4, after the adsorption is saturated, the CF4 is desorbed and recovered, the recovered CF4 can be reused after purification. Activated carbon will out of work after 1-2 years of use, but can react with F(fluorine gas) in the reaction furnace to generate CF4, the adsorbed CF4 is released and recovered during the main production process to achieve the recycling of CF4.
Type | YAC4A | YAC5 | PAC5 | ||
Appearance | Dark gray granules | ||||
Particle size | Φ2mm,Φ3mm,Φ4mm | 8x30 mesh | |||
Moisture (%) | ≤5 | ||||
Hardness (%) | ≥90% | ||||
Bulk density (g/l) | 550±30 | 520±30 | 500±30 | ||
TCNG(g/100ml) | 4.5 | 5.2 | |||
TCN(g/100ml) | ≥9 | ≥11 |
1. Super sacks: 500kg, 550kg, 1000kg.
2. Small bags: 25kg
3. According to customer's requirements. eg: 100kg steel drums.
The main feature of activated carbon for CF4 is that it not only can efficiently adsorb electron gas, especially CF4, but also can meet the requirements of using activated carbon to prepare CF4 after the adsorption saturated, which requires activated carbon to have high adsorption Values and lower acid-soluble substances, but also have a suitable specific surface area and pore distribution to facilitate the improvement of reaction efficiency during the preparation process. Our company uses coal with high fixed carbon content to further reduce ash and alkali metal substances through the process, and then through activation to control the specific surface area porosity, so that activated carbon not only meets the requirements of adsorption and desorption, but also meets the needs of preparing CF4. The activated carbon greatly improves the purity of the crude product in the CF4 production process, and greatly reduces the burden and additional consumption for the next rectification treatment.