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Single Target DC Magnetron Sputtering Coater for Laboratory Research on Solid Electrolytes and OLED

China Single Target DC Magnetron Sputtering Coater for Laboratory Research on Solid Electrolytes and OLED, Find details about China Magnetron Sputtering, Magnetron Sputtering Coater from Single Target DC Magnetron Sputtering Coater for Laboratory Research on Solid Electrolytes and OLED

Model NO.
CY-MSP300S-DC
Condition
New
Sample Stage
Diameter 185mm
Heating Temperature
Max 500 C
Chamber Material
Stainless Steel
Max Output Power
DC 500 W
Cooling Mode
Water Cooling
Trademark
CYKY
Transport Package
Wooden Case
Specification
Customized
Origin
Zhengzhou, China
HS Code
8416100000
Model NO.
CY-MSP300S-DC
Condition
New
Sample Stage
Diameter 185mm
Heating Temperature
Max 500 C
Chamber Material
Stainless Steel
Max Output Power
DC 500 W
Cooling Mode
Water Cooling
Trademark
CYKY
Transport Package
Wooden Case
Specification
Customized
Origin
Zhengzhou, China
HS Code
8416100000
Single target DC magnetron sputtering coater for laboratory research on solid electrolytes and OLED
single target magnetron sputtering coater introduction:
Single target DC magnetron sputtering coater equipment is a cost-effective magnetron sputtering coating equipment independently researched and developed by our company. It has the characteristics of standardization, modularization and customization. Magnetron targets can be selected from 1 inch, 2 inches and 3 inches, and customers can choose according to the size of the plated substrate; The power supply is a 1500W high-power DC power supply, which can be used for high-energy metal sputtering coating. According to experimental requirements, DC or RF power supplies of other specifications can also be selected to achieve coating operations of various materials.

The coating instrument has two high-precision mass flow meters, and customers can customize the gas path of up to four mass flow meters if they have other requirements to meet the requirements of complex gas environment construction; The instrument is equipped with an advanced turbomolecular pump set as standard, and the ultimate vacuum can reach 1.0E-5Pa. At the same time, other types of molecular pumps are available for purchase. The molecular pump's gas path is controlled by multiple solenoid valves, which can open the cavity to take out samples without turning off the pump, which greatly improves your work efficiency. This product can be equipped with an integrated industrial control computer to control the system. The computer program can realize most functions such as the control of the vacuum pump group and the control of the sputtering power supply, which can further improve the efficiency of your experiment.

Application scope of single target magnetron sputtering coater:

Single target DC magnetron sputtering coater can be used to prepare single-layer ferroelectric films, conductive films, alloy films, etc. Compared with similar equipment, this single-target magnetron sputtering coating instrument is not only widely used, but also has the advantages of small size and easy operation. It is an ideal equipment for laboratory preparation of material thin films, and is especially suitable for laboratory research on solid electrolytes and OLED etc.

single target magnetron sputtering coater technical parameters:
Single target DC magnetron sputtering coating instrument
Sample stageDimensionsφ185mm
Heating rangeRoom temperature~500ºC
Adjustable speed1-20rpm adjustable
magnetic
control
target
gun		Target planeCircular plane target
Sputtering vacuum10Pa~0.2Pa
Target diameter50~50.8mm
Target thickness2~5mm
Insulation voltage>2000V
Cable specificationsSL-16
Target head temperature<=65ºC
real
null
Cavity
body		Inner wall treatmentElectrolytic polishing
Cavity sizeφ300mm × 300mm
Cavity material304 stainless steel
Observation windowQuartz window, diameter φ100mm
Open methodTop opening, cylinder auxiliary support
gas
body
control
system		Flow controlMass flow meter, range 0~200SCCM argon gas
Control valve typeSolenoid valve
Control valve static stateNormally closed
Measuring linearity±1.5%F.S
Measurement repeatability±0.2%F.S
Measuring response time≤8 second(T95)
Working pressure range0.3MPa
Valve body pressure3MPa
Working temperature(5~45)ºC
Body materialStainless steel 316L
Valve body leakage rate1×10-8Pa.m3/s
Pipe joints1/4″Compression fitting
Input and output signal0~5V
Power supply±15V(±5%)(+15V  50mA,  -15V  200mA)
Overall dimensions mm130 (width) × 102 (height) × 28 (thickness)
Communication InterfaceRS485 MODBUS protocol
DC power supplyPower500W
Output voltage0~600V
Timing length65000 second
Start Time1~10 second
Film thickness measurementPower requirementsDC:5V(±10%)  Maximum current 400mA
Resolution±0.03Hz(5-6MHz),0.0136Å / Measurement (aluminum)
Measurement accuracy±0.5% thickness + 1 count
Measurement period100mS~1S/time (can be set)
Measuring range500,000 Å (aluminum)
Crystal frequency6MHz
Communication Interface  RS-232/485 serial interface
Display digits8-digit LED display
Molecular pumpMolecular pump pumping speed80L/S
Rated speed65000rpm
Vibration value<=0.1um
Start Time<=4.5min
Downtime<7min
Cooling methodAir-cooled
 Cooling water temperature<=37ºC
Cooling water flow rate1L/min
Installation directionVertical ±5°
Suction port150CF
Exhaust connectionKF40
Fore pumpPumping rate1.1L/S(VRD-4)
Ultimate vacuum5×10-2Pa
Power supplyAC:220V/50Hz
Power400W
Noise<=56db
Suction portKF40
Exhaust connectionKF25
Release valvePneumatic and electronically controlled air release valve is installed on the vacuum chamber
The ultimate vacuum of the whole machine<=5×10-4Pa
Vacuum chamber boost rate<=2.5Pa/h
Software system1 set of monitoring and management software
Test target2 copper targets with a diameter of 2 inches and a thickness of 3 mm

single target magnetron sputtering coater product pictures:

Single Target DC Magnetron Sputtering Coater for Laboratory Research on Solid Electrolytes and OLED
Single Target DC Magnetron Sputtering Coater for Laboratory Research on Solid Electrolytes and OLEDSingle Target DC Magnetron Sputtering Coater for Laboratory Research on Solid Electrolytes and OLEDSingle Target DC Magnetron Sputtering Coater for Laboratory Research on Solid Electrolytes and OLED

Single Target DC Magnetron Sputtering Coater for Laboratory Research on Solid Electrolytes and OLED

Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.

We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.
Single Target DC Magnetron Sputtering Coater for Laboratory Research on Solid Electrolytes and OLED
Single Target DC Magnetron Sputtering Coater for Laboratory Research on Solid Electrolytes and OLED
Single Target DC Magnetron Sputtering Coater for Laboratory Research on Solid Electrolytes and OLED
Q. Are you a manufacturer or a trading company?

A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.

Q. How is your company's product after-sales service system?

A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?

A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

Q. Our country's power supply and plug are different. How do you solve it?

A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

Q. How to pay?

A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.

Q. How is the package of goods? Delivery methods?

A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.

More questions, please contact customer service

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