Quartz tube for CVD process in semiconductor fabrication
1. Quartz glass tube for CVD
2. Purity 99.99% min
3. OEM is ok
4. No bubbles No airline
5. ISO 9001-2000
Advantage of the quartz glass tube:
1. High temperature resistant, 1100 degree.
2. Corrosion-resistant
3. Good thermal stability
4. Good transparency for light
5. Good electrical insulation
| AL | Fe | K | Na | Li | Ca | Mg | Cu | Mn | Cr | B | Ti |
| 5-12 | 0.19-1.5 | 0.71-1.6 | 0.12-1.76 | 0.38-0.76 | 0.17-1.23 | 0.05-0.5 | 0.05 | 0.05 | <0.05 | <0.1 | <1.0 |
Spectral transmission at 1.0mm thickness
| m m | <220 | 255 | 280 | 315 | 350 | 38 | 590 | 780 |
| % | 89 | 91 | 93 | 93 | 93 | 93 | 93.2 | 93.4 |
Physical Properties
| (g/cc)Density20 °C kg.m-3 | 2.2 |
| Degree of Hardness Moh's Scale | 5.5-5.6 |
| Softening point(degree) | 1683 |
| Annealing point | 1215 |
| Deformation Point | 1120 |