China Semiconductor Wafer Loading System Used Silicon Carbide Boat Holder Sic Cantilever Paddle, Find details about China Ceramic Beam, Silicon Carbide Cantilever Paddle from Semiconductor Wafer Loading System Used Silicon Carbide Boat Holder Sic Cantilever Paddle
Test Data | ||
Item | Unit | Data |
Max temperature of application | ºC | 1380 |
Density | g/cm³ | ≥3.02 |
Open porosity | % | <0.1 |
Bending strength | Mpa | 250(20ºC) |
Mpa | 250(20ºC) | |
Modulus of elasticity | Gpa | 330(20ºC) |
Gpa | 300(1200ºC) | |
Thermal conductivity | W/m.k | 45(1200ºC) |
Coefficient of thermal expansion | K¯1×10¯6 | 4.5 |
Rigidity | 13 | |
Acid alkaline-proof | Excellent |