China High Stability RF Power Supply Plasma Cleaner with Perfect Reflected Power Protection, Find details about China Plasma Cleaner, Plasma Cleaning from High Stability RF Power Supply Plasma Cleaner with Perfect Reflected Power Protection
Main parts | Item | Parameters |
Cleaning the chamber | Chamber material | High purity quartz |
Chamber size | Diameter 100 mm; Length 270 mm | |
RF power supply | Power supply features | The power supply is an all-solid-state RF power supply, and adopts a high-stability and high-reliability power amplifier module and a DC module, which effectively ensures the RF power output of the power supply. High quality electronic components are used to ensure the reliability of the products. |
Power advantage | Long time normal operation Simple and flexible operation High power supply efficiency and low heat generation With perfect reflection power protection function | |
RF power | 0~300W continuously adjustable | |
Signal frequency | 13.56MHz ±0.005% | |
Reflected power | ≤100W | |
Power stability | ±0.1% | |
RF connector | N type connector | |
Machine efficiency | ≥75% | |
Harmonic component | ≤-50 dBc | |
cooling method | Forced air cooling | |
Gas measurement | Measuring unit | Float flowmeter |
Gas channel | Two channels | |
A channel range | 10~100ml | |
B channel range | 16~160ml | |
Vacuum | Vacuum measurement | Digital vacuum gauge (resistance gauge) |
Vacuum pump | Two-stage rotary vane vacuum pump | |
Motor speed | 50 Hz: 1440; 60 Hz: 1720 | |
Pumping rate | 50 Hz: 1.1L/s; 60 Hz: 1.3L/s | |
Vacuum range | 0.1Pa~10000Pa | |
Ultimate vacuum | 0.5Pa | |
Motor noise | ≤56dB | |
Pipe interface | Gas inlet: KF16; exhaust port KF16. | |
Connecting pipe | KF16 vacuum bellows | |
Vacuum valve | Solenoid valve | |
Motor Power | 400W | |
Other | Power supply | AC220V 50/60Hz |
Total power | 800W | |
Operating temperature | -10ºC-40ºC | |
Working vacuum | ≤40Pa | |
Overall size | 540mm×650mm×440mm | |
Total Weight | 58kg (including packaging) |
Q. Are you a manufacturer or a trading company?
A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.
Q. How is your company's product after-sales service system?
A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.
Q. Our country's power supply and plug are different. How do you solve it?
A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.
Q. How to pay?
A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.
Q. How is the package of goods? Delivery methods?
A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.
More questions, please contact customer service