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Pecvd Tube Furnace Synthesis of Mono Layer Graphene and Materials for Solar Cells Applications

China Pecvd Tube Furnace Synthesis of Mono Layer Graphene and Materials for Solar Cells Applications, Find details about China Compact Pecvd Tube Furnace, Mini Pecvd System from Pecvd Tube Furnace Synthesis of Mono Layer Graphene and Materials for Solar Cells Applications

Model NO.
CY-O1200/50-3Z-PECVD
Limiting Temperature
1200c
Temperature Accuracy
+/-1c
Chamber Material
Alumina Fiber
Cooling Method
Air Cooling
Thermocouple
K Type
Trademark
CY
Transport Package
Wooden Box
Specification
Dia. 50mm
Origin
Zhengzhou, China
HS Code
85141090
Model NO.
CY-O1200/50-3Z-PECVD
Limiting Temperature
1200c
Temperature Accuracy
+/-1c
Chamber Material
Alumina Fiber
Cooling Method
Air Cooling
Thermocouple
K Type
Trademark
CY
Transport Package
Wooden Box
Specification
Dia. 50mm
Origin
Zhengzhou, China
HS Code
85141090
PECVD tube furnace synthesis of mono layer graphene and materials for solar cells applications
Model No.CY-O1200/50-3Z-PECVD
DisplayLED Button Light
Limiting temperature1200ºC
Working temperature≤1100ºC
Heating rate0-20ºC/min
Heating Zone length440mm, constant temperature zone:200mm
Quartz tube diameterOD50*1000mm
Temperature accuracy± 1ºC
Heating elementFe-Cr-Al alloy adopt by Mo
Thermal coupleK TYPE
Cooling methodDouble layer structure with fan cooling
Temperature control30 steps programmable PID control
Chamber materialAlumina fiber
Over-temperature alarmYes
Over-current alarmYes
Vacuum pumpMechanical vacuum pump
Cooling methodAir cooling
Connection pipestainless steel bellows, manual flap valve
 
Gas Mixer3 way gas mixer, as request
Accuracy±2%F.S.
Repeat accuracy±0.2% FS
Linear precision±1%F.S.
Working pressure:-0.1MPa~0.15MPa
MFC1 SiH4 Range0~10SCCM
MFC2 NH3 Range0~100SCCM
MFC3 BCl3 Range0~100SCCM, or as customized
RF frequency13.56MHz±0.005%
Power output range0~100w, adjustable
Cooling methodForced air cooling
Working voltageAC220V,50Hz
Pecvd Tube Furnace Synthesis of Mono Layer Graphene and Materials for Solar Cells Applications

 

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