China Mixed Atmosphere CVD Experimental Equipment, Customizable Technical Specifications, Find details about China CVD, CVD Equipment from Mixed Atmosphere CVD Experimental Equipment, Customizable Technical Specifications
Vacuum tube furnace | Model | CY- O1200-50IIT | |
Tube material | High purity quartz | ||
Tube diameter | 50mm (Optional 60mm, 80mm, 100mm) | ||
Tube length | 1000mm | ||
Furnace chamber length | 440mm | ||
Heating zone length | 200mm+200mm | ||
Operating temperature | 0~1100ºC | ||
Temperature control accuracy | ±1ºC | ||
Temperature control mode | 30 or 50 segment program temperature control | ||
Display mode | LCD | ||
Sealing method | 304 stainless steel vacuum flange | ||
Flange interface | 1/4" ferrule connector, KF16/25/40 joint | ||
Vacuum | 4.4E-3Pa | ||
Power supply | AC:220V 50/60Hz | ||
Gas supply system | Model | CY-3Z | |
Gas channel | 3-channel | ||
Measuring unit | Gas mass flow meter | ||
Measuring range | A channel: 0~100SCCM H2 gas | Remarks: If you need other ranges or gas types, you need to specify when ordering. According to the customer's specific requirements, the flow meter of the corresponding gas type and range can be selected. | |
B channel: 0~300SCCM N2 gas | |||
C channel: 0~500SCCM Ar gas | |||
measurement accuracy | ±1.0%F.S | ||
Pipe pressure resistance | 3MPa | ||
Working pressure difference | 50~300KPa | ||
Connecting pipe | 304 stainless steel | ||
Gas channel | 304 stainless steel needle valve | ||
Interface specification | 1/4" ferrule connector for gas inlet and outlet | ||
Exhaust system | Mechanical pump | Rotary vane pump | |
Pumping rate | 1.1L/S | ||
Exhaust interface | KF16 | ||
Vacuum measurement | Resistance gauge | ||
Ultimate vacuum | 1.0E-1Pa | ||
Power supply | AC:220V 50/60Hz | ||
Pumping interface | KF16 |